The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 09, 2003
Filed:
Sep. 24, 2001
Haruki Sonoda, Shizuoka-Ken, JP;
Kazuto Nishizaki, Shizuoka-Ken, JP;
Tetsuji Oishi, Shizuoka-Ken, JP;
Masatoshi Hirokawa, Shizuoka-Ken, JP;
Ei-Ichi Ando, Shizuoka-Ken, JP;
Yusuke Abe, Shizuoka-Ken, JP;
Masashi Omori, Shizuoka-Ken, JP;
SPC Electronics, Chofu, JP;
Abstract
There are provided a band-shaped tray having grasping grooves for grasping opposite side ends of wafers and a cleaning tank to which the wafers inserted in the tray are conveyed by a conveyor robot to be cleaned. The cleaning tank is provided with guides for mounting the tray in the tank, a bottom portion formed substantially in V-shape conforming to the bottom-face shape of the wafer and flow ports via which cleaning fluid is supplied into the tank. An outer side face of the cleaning tank is provided with an overflow tank for containing the cleaning fluid overflowing from the cleaning tank and the overflow tank is provided with a circulation line for circulating the cleaning fluid again into the cleaning tank