The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 13, 2003
Filed:
Aug. 11, 2000
Chung-Yang Lin, Hsin-chu, TW;
Yu-Sheng Shen, Hsin-chu, TW;
Young-Wang Lo, Hsin-chu, TW;
Chung-I Cheng, Hsin-chu, TW;
Taiwan Semiconductor Manufacturing Co., Ltd., Hsin Chu, TW;
Abstract
An apparatus and a method for retaining moisture on a polishing pad in chemical mechanical polishing during machine idling, i.e. during machine maintenance or repair are described. The apparatus is constructed of a circular disc in a clam-shell configuration having two halves for easy mounting or dismounting from a polishing pad. The circular disc may further include a protruded top portion to accommodate a polishing head when the chemical mechanical polishing apparatus is in a stand-by mode. The circular disc should have a diameter sufficiently large to cover an entire surface area of a polishing pad, while a peripheral edge of the circular disc overlaps a periphery of the polishing pad. The apparatus further includes a moisture retention means mounted on an inner surface of the circular disc for providing a moisturizing environment to the surface of the polishing pad. The moisture retention means can be suitably provided in brushes formed of moisture retaining bristles or in a cellulosic material layer. The apparatus may further include a fastening means for fastening the two clam-shell halves together which includes a hook-and-loop means, an adhesive means or a mechanical quick connect/disconnect means. The circular disc is preferably fabricated of a substantially transparent material, such as a transparent plastic, so that the condition of the polishing pad can be readily observed.