The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 06, 2003
Filed:
Oct. 31, 2000
Applicant:
Inventors:
Nicole Susan Carpenter, Burlington, VT (US);
Robert E. Fields, Colchester, VT (US);
Nicholas Mone, Jr., Essex Junction, VT (US);
Gary Michael Prescott, Essex Junction, VT (US);
Donald Walter Rakowski, Milton, VT (US);
Richard S. Ray, Williston, VT (US);
Assignee:
International Business Machines Corporation, Armonk, NY (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 3/7317 ; H01J 3/708 ;
U.S. Cl.
CPC ...
H01J 3/7317 ; H01J 3/708 ;
Abstract
The operating lifetime of a hot cathode discharge ion source is extended by introducing nitrogen into an ion implantation apparatus after introduction of an ion implantation gas, such as GeF , is stopped. The nitrogen is preferably introduced along with the GeF during implantation as well.