The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 29, 2003
Filed:
Mar. 05, 2001
Shunji Maeda, Yokohama, JP;
Atsushi Yoshida, Toyohashi, JP;
Yukihiro Shibata, Fujisawa, JP;
Minoru Yoshida, Yokohama, JP;
Sachio Uto, Yokohama, JP;
Hiroaki Shishido, Yokohama, JP;
Toshihiko Nakata, Hiratsuka, JP;
Hitachi, Ltd., Tokyo, JP;
Abstract
A defect inspection apparatus for inspecting a fine circuit pattern with high resolution to detect a defective portion is constructed to have an objective lens for detecting an image of a sample, a laser illumination unit for illuminating the sample through the objective lens, a unit for reducing the coherence of the laser illumination, an accumulation type detector, and a unit for processing the detected image signal.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile