The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 22, 2003
Filed:
Sep. 13, 2000
Kenji Obara, Yokohama, JP;
Yuji Takagi, Kamakura, JP;
Toshifumi Honda, Yokohama, JP;
Ryo Nakagaki, Kawasaki, JP;
Toshiei Kurosaki, Hitachinaka, JP;
Yasuhiko Ozawa, Abiko, JP;
Hitachi, Ltd., Tokyo, JP;
Abstract
The present invention improves inspection efficiency in detailed inspections of defects performed based on inspection information from a defect inspection. Particles and defects are detected by a defect inspection device . If the cause of the particles and defects are to be determined by performing a detailed inspection with a details inspection device using an SEM or the like, attributes are determined on the particles and defects detected by the defects inspection device before the detailed inspection is performed. The attributes are determined with an attribute inspection device using an optical microscope or the like. Based on these attributes, the defects and particles are separated into those that require detailed inspection and those that do not require detailed inspection or that cannot be inspected in detail. A details inspection device is used to inspect the particles and defects requiring detailed inspection.