The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 11, 2003
Filed:
Nov. 18, 1998
Tsiu Chiu Chan, Carrollton, TX (US);
Pervez H. Sagarwala, Grand Prairie, TX (US);
Loi Nguyen, Carrollton, TX (US);
STMicroelectronics, Inc., Carrollton, TX (US);
Abstract
A memory cell for an EEPROM memory is fabricated to provide increased oxide thickness at the edge of the tunnel oxide and under the edges of the polysilicon capacitor plate in order to improve the dielectric integrity of the capacitor structure. In one embodiment using a silicided polysilicon process, the oxide is made thicker at the edge of the tunnel oxide by reoxidizing the silicon at the corner of the polysilicon capacitor plate and the underlying substrate surface by exposing the device to a short duration oxidation step after having deposited a 200 Å to 500 Å thick porous oxide over the device to protect the silicide from excessive exposure to the oxidizing ambient. In another embodiment the tunnel oxide is grown in a window in the gate oxide layer, which is about four times thicker than the tunnel oxide, so that the gate oxide completely surrounds the tunnel oxide, and the polysilicon capacitor plate extends beyond the edge of the tunnel oxide terminating at a point above the gate oxide.