The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 28, 2003
Filed:
Sep. 28, 2000
Applicant:
Inventors:
Assignee:
Semiconductor Diagnostics, Inc., Tampa, FL (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01R 3/1302 ; G01R 3/126 ;
U.S. Cl.
CPC ...
G01R 3/1302 ; G01R 3/126 ;
Abstract
Minority carrier diffusion lengths are determined fast, accurately, and conveniently by illuminating a surface of the semiconductor with a beam composed of a plurality of light fluxes each having a different wavelength modulated at a different frequency. Surface photovoltages induced by different light fluxes are simultaneously detected by monitoring surface photovoltage signals at the different modulation frequencies. The surface photovoltage signals are frequency calibrated and then used to calculated a minority carrier diffusion length.