The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 07, 2003
Filed:
Jan. 05, 2001
Karl-Heinz Schuster, Königsbronn, DE;
Hubert Holderer, Königsbronn, DE;
Rudolf Von Bünau, Essingen, DE;
Christian Wagner, Aalen, DE;
Jochen Becker, Oberkochen, DE;
Stefan Xalter, Oberkochen, DE;
Wolfgang Hummel, Schwäbisch Gmünd, DE;
Carl-Zeiss-Stiftung, , DE;
Abstract
An optical arrangement, in particular a microlithographic projection printing installation, has in particular a slot-shaped image field or rotationally non-symmetrical illumination. An optical element ( ) is therefore acted upon in a rotationally non-symmetrical manner by the radiation of the light source. A compensating light supply device ( to ) is optically coupled via the peripheral surface ( ) of the optical element ( ) to the latter. It supplies compensating light ( ) to the optical element ( ) in such a way that the temperature distribution in the optical element ( ), which arises as a result of cumulative heating of the optical element ( ) with projection light ( ) and compensating light ( ), is at least partially homogenized. In said manner image defects induced by the projection light are corrected.