The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 07, 2003
Filed:
Oct. 03, 2000
Xiaomeng Chen, Poughkeepsie, NY (US);
Mahadevaiyer Krishnan, Hopewell Junction, NY (US);
Judith M. Rubino, Ossining, NY (US);
Carlos J. Sambucetti, Croton-on-Hudson, NY (US);
Soon-Cheon Seo, White Plains, NY (US);
James A. Tornello, Cortlandt Manor, NY (US);
International Business Machines Corp., Armonk, NY (US);
Abstract
The invention provides a process to increase the reliability of BEOL interconnects. The process comprises forming an array of conductors on a dielectric layer on a wafer substrate, polishing the upper surface so that the surfaces of the conductors are substantially co-planar with the upper surface of the dielectric layer, forming an alloy film on the upper surfaces of the conductors, and brush cleaning the upper surfaces of the conductors and the dielectric layer.