The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 12, 2002
Filed:
Dec. 01, 1999
Applicant:
Inventors:
Kung Linliu, Hsinchu, TW;
Mai-Ru Kuo, Hsinchu, TW;
Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 2/1312 ;
U.S. Cl.
CPC ...
H01L 2/1312 ;
Abstract
A method of forming an anti-reflective coating is described. A film is formed on a substrate. A first layer of an anti-reflective coating layer Is deposited on the film by chemical vapor deposition using a canrier gas, an organic halide gas and a hydrogen halide gas as gas sources. A second layer of the anti-reflective coating layer is formed on the first layer of the anti-reflective coating layer by chemical vapor deposition using a carrier gas and an organic halide gas as gas sources. A photoresist layer is formed on the second layer of the anti-reflective coating layer.