The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 24, 2002
Filed:
Feb. 15, 2001
Yu-Ju Yang, Hsin-Chu, TW;
Yu-Hong Huang, Tainan, TW;
Ching-Ming Lee, Hsin-Chu, TW;
Kuo-Yuh Yang, Hsin-Chu, TW;
Abstract
The present invention provides a method for forming capacitor of a dynamic random access memory cell. The method comprises providing a substrate and the word line structures formed thereon. A first dielectric layer is deposited on the substrate and the word line structures. A first polysilicon layer is deposited to form bit line contacts and bit lines. A second dielectric layer is formed on the first dielectric layer and the bit lines. The partial second dielectric layer is removed to form at least a wall structure in the second dielectric layer. The partial second dielectric layer and partial first dielectric layer are removed to form a capacitor contact opening. A second polysilicon is deposited into the capacitor contact opening and on the wall structure and the second dielectric layer. The partial second polysilicon is removed to form a capacitor node whereby a side-wall of the capacitor node is adjacent to the wall structure.