The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 17, 2002
Filed:
Jun. 19, 2001
Applicant:
Inventors:
Yuko Iwabuchi, Mito, JP;
Hideo Todokoro, Nishitama-gun, JP;
Hiroyoshi Mori, Hitachinaka, JP;
Mitsugu Sato, Hitachinaka, JP;
Yasutsugu Usami, Toshina-ku, JP;
Mikio ichihashi, Kodaira, JP;
Satoru Fukuhara, Hitachinaka, JP;
Hiroyuki Shinada, Chofu, JP;
Yutaka Kaneko, Hachiouji, JP;
Katsuya Sugiyama, Kashiwa, JP;
Atsuko Takafuji, Nerima-ku, JP;
Hiroshi Toyama, Hachiouji, JP;
Assignee:
Hitachi, Ltd., Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 3/728 ;
U.S. Cl.
CPC ...
H01J 3/728 ;
Iwabuchi, Yuko. (2002). Method and an apparatus of an inspection system using an electron beam (U.S. Patent No. 6452178). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/6452178
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile