The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 13, 2002
Filed:
Dec. 07, 1999
Masatoshi Hirokawa, Shizuoka-Ken, JP;
Haruki Sonoda, Shizuoka-Ken, JP;
Yusuke Abe, Shizuoka-Ken, JP;
Tetsuji Oishi, Shizuoka-Ken, JP;
Masashi Omori, Shizuoka-Ken, JP;
Hiroshi Tanaka, Tokyo, JP;
SPC Electronics Corporation, Tokyo, JP;
Abstract
A multi-step flow cleaning method and a multi-step flow cleaning apparatus are provided which effectively clean workpieces with a stream of a cleaning solution and to suppress an increase of foreign matters adhering to the surfaces of the workpieces. A cleaning tank for holding workpieces is provided, a supply line for supplying a cleaning solution such as pure water from the bottom surface of the cleaning tank is provided, and a valve for adjusting the flow of the cleaning solution is disposed in the middle of the supply line . The valve is equipped with a switching section for controlling the outflow of the cleaning solution by opening or closing the supply line , and a bypass for supplying the cleaning solution, bypassing the switching section . The valve is provided such that it is able to adjust in two steps the supply flow of the cleaning solution supplied to the cleaning tank by using the supply flow fed through the bypass and the supply flow fed through the switching section