The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 23, 2002
Filed:
Dec. 28, 2000
Raphael A. Dandl, San Marcos, CA (US);
Wayne L. Johnson, Tempe, AZ (US);
Gareth Guest, La Jolla, CA (US);
Tokyo Electron Limited, Tokyo, JP;
Abstract
A plasma pumping cell and method for pumping ions from a first region containing a plasma to a second region when the plasma pumping cell is interposed between the first and second regions, the plasma pumping cell including: a partition member ( ) positioned between the first and second regions, the partition member ( ) having a through opening defining a conduit ( ); a plurality of magnets ( ) positioned relative to the conduit in a manner to provide lines of magnetic force that extend through the conduit; a source of free electrons in communication with the conduit; and an electric potential source ( ) disposed relative to the conduit to create an electrostatic field which accelerates ions from the conduit ( ) to the second region.