The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 09, 2002
Filed:
Feb. 16, 1999
Katuki Yamasaki, Kurume, JP;
Osamu Kuroda, Tosu, JP;
Kazuyuki Honda, Tosu, JP;
Hiroshi Yamahata, Dazaifu, JP;
Tokyo Electron Limited, , JP;
Abstract
A substrate transporting apparatus includes a wafer transfer arm for carrying a plurality of semiconductor wafers W being processed horizontally, a pitch changer for carrying the wafers W at predetermined intervals vertically and a posture changing device positioned between the wafer transfer arm and the pitch changer , for changing the posture of the wafers W to the horizontal and vertical arrangements. The pitch changer includes a first holding part A and a second holding part B which are adapted so as to elevate relatively to each other. The wafers W are held by either one of the holding parts A, B at the predetermined intervals. The posture changing device has a pair of holders 31 between which the semiconductor wafers W is interposed. The holders are respectively provided, on their sides opposing each other, with a plurality of holding grooves A, B for retaining the wafers W independently. With the arrangement, the whole apparatus can be small-sized to improve throughput and yield of products.