The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 02, 2002
Filed:
Feb. 08, 2000
Applicant:
Inventors:
Gerhard M. Schneider, Cupertino, CA (US);
Hamid Noorbakhsh, Fremont, CA (US);
Bryan Pu, San Jose, CA (US);
Kaushik Vaidya, Sunnyvale, CA (US);
Brad Leroy Mays, San Jose, CA (US);
Hung Dao, San Jose, CA (US);
Evans Lee, Milpitas, CA (US);
Hongging Shan, Cupertino, CA (US);
Assignee:
Applied Materials, Inc., Santa Clara, CA (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
C23C 1/600 ; H05H 1/00 ;
U.S. Cl.
CPC ...
C23C 1/600 ; H05H 1/00 ;
Abstract
A substrate support assembly comprises a substrate support and a collar which may comprise at least one slit . The slit allows for thermal expansion compensation in the support assembly . The collar may, for example, protect the dielectric from erosion in a process chamber . In one version, the collar comprises a clamping ring on the dielectric