The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 26, 2002
Filed:
Dec. 18, 1996
Koichiro Moriyama, Kyoto, JP;
Hiroshi Echizen, Nagahama, JP;
Masahiro Kanai, Kyoto, JP;
Hirokazu Ohtoshi, Nara, JP;
Takehito Yoshino, Nara, JP;
Atsushi Yasuno, Nagahama, JP;
Kohei Yoshida, Utsunomiya, JP;
Yusuke Miyamoto, Yokohama, JP;
Canon Kabushiki Kaisha, Tokyo, JP;
Abstract
To provide a deposited-film forming process and a deposited-film forming apparatus that may cause no scratches on the film forming surface to improve yield and enable stable discharge to thereby continuously form deposited films having uniform quality and uniform thickness, deposited films are formed by lengthwise continuously transporting a belt-like substrate so as to form a part of a discharge space, wherein the substrate is transported while bringing the transverse sectional shape of the substrate which forms a part of the discharge space into a curved shape by a roller.