The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 19, 2002
Filed:
Dec. 28, 1999
Applicant:
Inventors:
Donald F. Canaperi, Bridgewater, CT (US);
William J. Cote, Poughkeepsie, NY (US);
Paul Feeney, Aurora, IL (US);
Mahadevaiyer Krishnan, Hopewell Junction, NY (US);
Joyce C. Liu, Hopewell Junction, NY (US);
Michael F. Lofaro, Milton, NY (US);
Philip Murphy, New Fairfield, CT (US);
Eric Jeffrey White, Charlotte, VT (US);
Assignee:
International Business Machines Corporation, Armonk, NY (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C09G 1/02 ; C09G 1/04 ; B24B 1/00 ;
U.S. Cl.
CPC ...
C09G 1/02 ; C09G 1/04 ; B24B 1/00 ;
Abstract
Slurry compositions comprising an oxidizing agent, copper corrosion inhibitor, abrasive particles; surface active agent and polyelectrolyte are useful for polishing or planarizing chip interconnect/wiring material such as Al, W and especially Cu.