The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 15, 2002
Filed:
Jun. 22, 1999
Takehito Yoshino, Nara, JP;
Hiroshi Echizen, Nagahama, JP;
Masahiro Kanai, Kyoto, JP;
Hirokazu Otoshi, Nara, JP;
Atsushi Yasuno, Nagahama, JP;
Kohei Yoshida, Kyoto, JP;
Koichiro Moriyama, Kyoto, JP;
Masatoshi Tanaka, Nagahama, JP;
Canon Kabushiki Kaisha, Tokyo, JP;
Abstract
A film forming method is described using an apparatus with a plurality of vacuum chambers which communicate with each other via a connection, where the apparatus has one or more detachable treatment rooms and where the method includes continuously forming a plurality of films on a band-shaped substrate within the treatment rooms, while continuously moving the substrate through the treatment rooms. The treatment rooms within said desired vacuum chambers are replaced after forming the film for a predetermined period as a part of the film forming method.