The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 14, 2001
Filed:
Apr. 06, 1999
Kuang-Yung Wu, Taoyuan, TW;
Jia-Rurng Hwu, Tainan Hsien, TW;
Tien-Min Yuan, Taipei, TW;
Shih-Chi Lai, Hsinchu Hsien, TW;
Mosel Vitelic Inc., Hsinchu, TW;
Abstract
A method for preventing corrosion and particulate in a load-lock chamber is disclosed. The load-lock chamber is adjourning with an etching chamber and a wafer transferred module, each time a wafer in the cassette is transferred into the etching chamber for etching by a transfer arm. After that, the etched wafer is withdrawn by the same way to the cassette. The load-lock chamber comprising an outlet of N,-purge tube therein for venting the vacuum in the load-lock chamber to the surrounding. The method comprising at least a step of coupling heating means to the N,-purge tube, or heating N,gases before injecting into the N,-purge tube so that the temperature of the N,-purge tube will at least not lower than the temperature of an environment within the load-lock chamber.