The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 10, 2001
Filed:
Jan. 11, 1999
Chen-Hua Yu, Hsin-chu, TW;
Shwangming Jeng, Hsin-chu, TW;
Taiwan Semiconductor Manufacturing Company, Hsin-Chu, TW;
Abstract
Low dielectric inter-metal dielectric (IMD) layers made of hydrogen silsesquioxane (HSQ) or methyl silsesquioxane (MSQ) spin-on-glass do not have good thermal conductivity as compared to regular oxides, in addition the adhesion of HSQ or MSQ is worse than that of oxide to oxide layers Methods are disclosed and illustrated to improve the heat transfer by providing metal dummy plugs under and/or around bonding pads or between metallization layers. The arrangement and numbers of dummy plugs depends on the heat to be transferred and varies with the application. Good thermal conductivity is of particular importance because the effects of high local temperature around bonding pads during chip bonding results in thermal stress and delamination of the IMD layers. The use of bonding pads provides other benefits as well.