The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 01, 2001
Filed:
Mar. 29, 1999
Applicant:
Inventors:
Robert G. Boehm, Jr., Fremont, CA (US);
Anil K. Pant, Santa Clara, CA (US);
Wilbur C. Krusell, Palo Alto, CA (US);
Erik H. Engdahl, Livermore, CA (US);
Assignee:
Lam Research Corporation, Fremont, CA (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
B24B 5/00 ;
U.S. Cl.
CPC ...
B24B 5/00 ;
Abstract
A temperature compensating unit is coupled to a linearly moving belt of a polisher for adjusting the temperature of the belt, which temperature is measured by a sensor situated proximal to the belt.
Quick Actions:
Boehm, Jr., Robert. (2001). Method and apparatus for stabilizing the process temperature during chemical mechanical polishing (U.S. Patent No. 6224461). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/6224461
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile