The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 27, 2001
Filed:
Jul. 29, 1999
Applicant:
Inventors:
Assignee:
Texas Instruments Incorporated, Dallas, TX (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 2/1421 ;
U.S. Cl.
CPC ...
H01L 2/1421 ;
Abstract
A cost-effective method for fabricating MIM capacitors (,). After metal (,) deposition, the metal oxide (,) is formed using an oxidation chemistry that includes CO2 and H2. The CO2/H2 gas ratio is controlled for selective oxidation. Thus, the metal (,) is effectively protected from oxidation due to the existence of both H2 and CO2 as strong reduction reagent.