The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 19, 2000
Filed:
Jun. 08, 1999
Applicant:
Inventor:
Kuan-Yang Liao, Taipei, TW;
Assignees:
United Silicon Incorporated, , TW;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L / ;
U.S. Cl.
CPC ...
438692 ; 438719 ; 438720 ; 438740 ;
Abstract
A method of defining the conductive layer is described in which a substrate comprises a dielectric layer and a conductive layer is formed covering the entire substrate. A common photolithography and etching process is conducted to form a wide trench pattern. An adjustment structure is also formed next to the sidewall on both sides of the trench such that the distance between the adjustment structures is same as the desired width of the conductive structure. After which, a cover layer is formed to fill the trench. Using the cover layer as a self-aligned hard mask, an anisotropic etching process is conducted to form a conductive structure.