The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 21, 2000
Filed:
Aug. 25, 1998
Applicant:
Inventors:
Koji Kimoto, Hitachi, JP;
Yoshifumi Taniguchi, Hitachinaka, JP;
Shunroku Taya, Mito, JP;
Shigeto Isakozawa, Hitachinaka, JP;
Takashi Aoyama, Tokai-mura, JP;
Masakazu Saito, Mobara, JP;
Tomoko Sekiguchi, Hachioji, JP;
Assignee:
Hitachi, Ltd., Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J / ;
U.S. Cl.
CPC ...
250305 ; 250311 ; 2503 / ;
Abstract
An energy filter has a plurality of deflection means and is constructed by using the plural deflection means so that an average track of an electron beam is symmetric and the normal line to a symmetric plane is inclined against an incident direction of the electron beam.