The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 25, 2000
Filed:
Apr. 15, 1998
Hiroki Oka, Yamanashi-ken, JP;
Yoji Iizuka, Tokyo, JP;
Kenichi Nakagawa, Yamanashi-ken, JP;
Jun Hirose, Yamanashi-ken, JP;
Tatsuya Nakagome, Yamanashi-ken, JP;
Hiroshi Koizumi, Yamanashi-ken, JP;
Hiroshi Ohno, Tokyo, JP;
Tokyo Electron Limited, , JP;
V Tex Corporation, , JP;
Abstract
Provided is a gate valve for opening and closing an aperture formed in a body of a chamber and designed so that an object is loaded into or unloaded from the chamber, comprising a lift mechanism provided on a side portion of the chamber body, a supporting portion supported by a lift mechanism for up-and-down motion, a valve plate supported by the supporting portion and movable between a closed position such as to close the aperture of the chamber body and an open position such that the valve plate is separated from the aperture to leave the aperture open as the supporting portion is moved up and down by the lift mechanism, and a separating mechanism for allowing the valve plate to move to a position ahead of the aperture so that the valve plate is separated from the aperture.