The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 20, 2000
Filed:
Jul. 22, 1997
George J Everage, San Diego, CA (US);
Igor V Fomenkov, San Diego, CA (US);
Palash P Das, Vista, CA (US);
Richard L Sandstrom, Encinitas, CA (US);
Cymer, Inc., San Diego, CA (US);
Abstract
A wavelength shift correction system for a laser system is provided for correcting wavelength chirps. This wavelength shift correction system includes a learning algorithm that learns characteristics of a wavelength chirp from a laser and a computer system that executes the learning algorithm and provides wavelength correction control signals based on the learned characteristics to reduce the magnitude of the wavelength shift of the present wavelength chirp and subsequent wavelength chirps.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile