The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 21, 2000
Filed:
Sep. 11, 1997
Applicant:
Inventors:
Hatsuyuki Arai, Kanagawa, JP;
Yasushi Ikeyama, Kanagawa, JP;
Assignee:
Speedfam Co., Ltd., Tokyo, JP;
Attorneys:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L / ;
U.S. Cl.
CPC ...
438691 ; 438692 ;
Abstract
A single sensor 19 simultaneously measures the thickness and contour of a polishing pad 3 before and after polishing to determine changes in the thickness and contour of the polishing pad 3 caused by polishing. Based on these changes, a reproduction signal for pad reproduction or a replacement signal for pad replacement is output from a controlling means 13 to enable the surface accuracy of the polishing pad to be efficiently controlled.
Arai, Hatsuyuki. (2000). Polishing pad control method and apparatus (U.S. Patent No. 6040244). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/6040244
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile