The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 11, 2000
Filed:
Oct. 21, 1998
Applicant:
Inventors:
Gary Bela Bronner, Stormville, NY (US);
Stephan Alan Cohen, Wappingers Falls, NY (US);
David Mark Dobuzinsky, Hopewell Junction, NY (US);
Jeffrey Peter Gambino, Gaylordsville, CT (US);
Herbert Lei Ho, New Windsor, NY (US);
Karen Popek Madden, Poughquag, NY (US);
Assignee:
International Business Machines Corporation, Armonk, NY (US);
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01G / ; B95D / ;
U.S. Cl.
CPC ...
361311 ; 361322 ; 3613215 ; 427 79 ; 427 81 ;
Abstract
A composite dielectric material useful in advanced memory applications such as dynamic random access memory (DRAM) cells is provided. The composite dielectric material of the present invention includes a mixed oxide such as TiO.sub.2 or Ta.sub.2 O.sub.5 that is interdiffused into a Si.sub.3 N.sub.4 film. Capacitors including the composite dielectric material of the present invention are also disclosed.