The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 16, 1999
Filed:
Jan. 29, 1998
Arik Donde, Cupertino, CA (US);
Hyman J Levinstein, Berkeley Heights, NJ (US);
Robert W Wu, Pleasanton, CA (US);
Andreas Hegedus, San Francisco, CA (US);
Edwin C Weldon, Los Gatos, CA (US);
Shamouil Shamouilian, San Jose, CA (US);
Jon T Clinton, San Jose, CA (US);
Surinder S Bedi, Fremont, CA (US);
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
A puncture resistant electrostatic chuck (20) is described. The chuck (20) comprises at least one electrode (25); and a composite insulator (30) covering the electrode. The composite insulator comprises a matrix material having a conformal holding surface (50) capable of conforming to the substrate (35) under application of an electrostatic force generated by the electrode to reduce leakage of heat transfer fluid held between the substrate and the holding surface. A hard puncture resistant layer, such a layer of fibers or an aromatic polyamide layer, is positioned below the holding surface (50) and is sufficiently hard to increase the puncture resistance of the composite insulator.