The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 16, 1999
Filed:
Mar. 09, 1998
Matthew E Seelig, Rochester, NY (US);
Silvio P Marchese-Ragona, Rochester, NY (US);
Chapman Instruments Inc., Rochester, NY (US);
Abstract
An optical profilometer having a movable head for measurement of the profile of a surface of a wafer under test in response to an optical beam projected by the head and incident onto the surface. The wafer may be a substrate for a data storage disc, and the surface may be one of a plurality of surfaces of the wafer, including the side face, the edge, and a radius or bevel therebetween. A fixture for holding the wafer includes a frame for orienting the wafer and also pivotally rotating the wafer about an axis. A vacuum chuck holds the wafer on the frame. An actuator orients the fixture frame in an plurality of positions spaced angularly about the axis to present selected ones of the wafer surfaces to the beam for profile measurement. Wafers of various diameters may be accommodated on the fixture.