The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 12, 1999
Filed:
Sep. 18, 1997
Applicant:
Inventors:
David L Rath, Stormville, NY (US);
Rangarajan Jagannathan, South Burlington, VT (US);
Kenneth J McCullough, Fishkill, NY (US);
Harald F Okorn-Schmidt, Putnam Valley, NY (US);
Karen P Madden, Poughquag, NY (US);
Keith R Pope, Danbury, CT (US);
Assignee:
International Business Machines Corporation, Armonk, NY (US);
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L / ; H01L / ;
U.S. Cl.
CPC ...
438745 ; 438757 ; 252 791 ;
Abstract
Silicon nitride is etched employing a composition containing a fluoride containing compound, certain organic solvents, and water.