The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 28, 1999
Filed:
Jul. 14, 1997
Applicant:
Inventors:
John Brown, Brookfield, CT (US);
Matthew J Costello, Bethel, CT (US);
Luciano P DosSantos, Danbury, CT (US);
Robin Ruck, Southbury, CT (US);
Assignee:
Wentworth Laboratories, Inc., Brookfield, CT (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01R / ; G01R / ;
U.S. Cl.
CPC ...
324765 ; 324753 ; 324754 ;
Abstract
An adapter for holding a silicon wafer in an inverted position of a probe station to allow backside emission testing is described. The wafer is positioned in a carrier having an opening therethrough for backside emission testing while the wafer is energized and probed beneath the carrier. A special probe card holder is provided with a self-leveling feature by means of a leveling frame on the probe card holder cooperating with the wafer carrier.