The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 27, 1999
Filed:
Jul. 16, 1997
Cheng-Hsun Tsai, Hsinchu, TW;
Yui-Ping Huang, Hsinchu, TW;
Mao-Song Tseng, Hsinchu, TW;
Yuan-Lung Lin, Hsinchu, TW;
Mosel Vitelic Inc., , TW;
Abstract
The present invention provides a method for forming a device on a wafer without peeling, in which the wafer has a substrate forming thereon a first dielectric layer forming thereon a first conducting layer having thereon a device area and an edge area. This method includes steps of a) forming a second dielectric layer on the device area and the edge area, b) forming a photoresist layer on the second dielectric layer, c) selectively removing the second dielectric layer, the photoresist layer, and the first conducting layer from and presenting thereby the device area and the edge area with a desired dielectric layer, and d) forming a metal film on the device area and the edge area.