The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 22, 1999
Filed:
Dec. 08, 1997
An-Min Chiang, Hsin-Chu, TW;
Long-Shang Juang, Tainan District, TW;
Chi-Shiang Lee, Hua-Lien, TW;
Jyh-Feng Lin, Hua-Lien, TW;
Taiwan Semiconductor Manufacturing Company, Ltd., Hsin-Chu, TW;
Abstract
A process for fabricating a flash EEPROM device, incorporating a shallow, heavily doped, source side region, used to improve the endurance of the flash EEPROM device, has been developed. The process features placing a shallow, ion implanted arsenic region, in the semiconductor substrate, adjacent to one side of a floating gate structure, prior to creation of the control gate structure. The addition of the shallow, ion implanted arsenic region, improves the coupling ratio at the source, which in turn results in the ability of the flash EEPROM device to sustain about 1,000,000 program/erase cycles, compared to counterparts, fabricated without the shallow, source side region, only able to sustain about 400,000 program/erase cycles.