The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 01, 1998
Filed:
Jun. 03, 1996
Applicant:
Inventors:
Chung-Kuang Lee, Hsin-Chu, TW;
Pin-Nan Tseng, Hsin-Chu, TW;
Assignee:
Taiwan Semiconductor Manufacturing Company Ltd., Hsin-Chu, TW;
Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
H01L / ;
U.S. Cl.
CPC ...
438636 ; 438648 ; 438637 ; 438685 ; 438906 ;
Abstract
A process for creating tungsten plugs, to fill high aspect ratio contact holes, has been developed. Narrow seams in the center of a tungsten plug, are protected from the tungsten RIE etch back process, thus avoiding the creation of larger seams or voids. This is accomplished by delaying the tungsten RIE etch back step until formation of an overlying interconnect metallization structure, which will protect the underlying tungsten plug, and seam, during the subsequent tungsten RIE etch back procedure.