The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 11, 1998
Filed:
Aug. 09, 1995
Applicant:
Inventors:
Joseph V Cesna, Niles, IL (US);
Chris E Karlsrud, Chandler, AZ (US);
Spencer Preston, Chandler, AZ (US);
Assignee:
Speedfam Corporation, Des Plaines, IL (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B24B / ; B24B / ; B24B / ; B24B / ;
U.S. Cl.
CPC ...
451 63 ; 451285 ; 451287 ; 451288 ; 451364 ;
Abstract
A method of fabricating a soft, resilient backing pad adapted for attachment to a pressure plate for planarizing work pieces wherein the outer exposed surface of the pad has been abraded by means of dry abrasive particles fixed on a surface of a spherical convex lapping wheel.