The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 07, 1998
Filed:
Oct. 01, 1996
James Thomas Fahey, Dutchess County, NY (US);
Brian Wayne Herbst, Dutchess County, NY (US);
Leo Lawrence Linehan, Orange County, NY (US);
Wayne Martin Moreau, Dutchess County, NY (US);
Gary Thomas Spinillo, Dutchess County, NY (US);
Kevin Michael Welsh, Hennepin County, MN (US);
Robert Lavin Wood, Dutchess County, NY (US);
International Business Machines Corporation, Armonk, NY (US);
Abstract
A co-polymer of benzophenone and bisphenol A has been shown to have DUV absorption properties. Therefore, the co-polymer has particular utility as an antireflective coating in microlithography applications. Incorporating anthracene into the co-polymer backbone enhances absorption at 248 nm. The endcapper used for the co-polymer can vary widely depending on the needs of the user and can be selected to promote adhesion, stability, and absorption of different wavelengths.