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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 5735951 B1

PDFFull Text
Date of Patent:
Apr. 07, 1998

Filed:

Jul. 01, 1996

Single crystal pulling apparatus

Applicant:
Inventors:

Eiichi Iino, Gunma-ken, JP;

Kiyotaka Takano, Gunma-ken, JP;

Masanori Kimura, Gunma-ken, JP;

Koji Mizuishi, Gunma-ken, JP;

Hirotoshi Yamagishi, Gunma-ken, JP;

Assignee:

Shin-Etsu Handotai Co., Ltd., Tokyo, JP;

Attorney:

Snider; Ronald R.

Primary Examiner:

Felisa Garrett

Int. Cl.
CPC ...
C30B / ;
U.S. Cl.
CPC ...
117217 ; 117208 ; 117900 ;
Abstract

A single crystal pulling apparatus which eliminates trouble caused by an isolation valve heated to a high temperature uses a heat insulation plate provided below the isolation valve. The heat insulation plate is operated synchronously with the opening or closing of the isolation valve. The heat insulation plate prevents hot gases from coming from the lower chamber from coming into direct contact with the isolation valve. The prevention of overheating of the isolation valve provides for smooth operation and growth of a good quality single crystal.

Find Patent Forward Citations

Iino, Eiichi. (1998). Single crystal pulling apparatus (U.S. Patent No. 5735951). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/5735951

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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