The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 16, 1997
Filed:
Aug. 16, 1995
Lawrence H Herko, Walworth, NY (US);
David J Collins, Fairport, NY (US);
Kevin A Lindamood, Pittsburgh, PA (US);
Xerox Corporation, Stamford, CT (US);
Abstract
An improved back cut method is provided in a dicing procedure for separating a plurality of printheads formed in a silicon wafer. The wafer has alignment fiducial marks formed within a composite wafer. Infrared light is directed into the wafer and is reflected back through the wafer from the fiducial marks. The reflected light is detected by a CCD camera mounted on a dicing saw. The fiducial coordinates are stored in memory and displayed so that the dicing saw can be aligned with regard to the alignment marks. A back cut operation is enabled so that the saw partially cuts through the composite wafer. A subsequent dicing step separates individual printheads from the wafer.