The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 09, 1997
Filed:
May. 19, 1994
Shori Mokuo, Saga-ken, JP;
Tokyo Electron Limited, Tokyo, JP;
Tokyo Electron Kyushu Limited, Tosu, JP;
Abstract
A communication system used in a semiconductor device manufacturing equipment includes a master side transmission unit having a master transmitting logic module for transmitting information in an inverted two-successive transmission mode in which information having non-inverted information and inverted information of the non-inverted information as one pair is transmitted and a master receiving logic module, and a plurality of slave side transmission units respectively mounted on a plurality of process units of a cleaning apparatus of the semiconductor device manufacturing equipment and each having a slave transmitting logic module and a slave receiving logic module which receives the non-inverted information and inverted information, for fetching the information when the contents of the non-inverted information and inverted information coincide with each other.