The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 30, 1996
Filed:
Mar. 16, 1995
Applicant:
Inventors:
James W Thackeray, Braintree, MA (US);
George W Orsula, Tewksbury, MA (US);
Mark D Denison, Cambridge, MA (US);
Roger Sinta, Woburn, MA (US);
Sheri L Ablaza, Brookline, MA (US);
Assignee:
Shipley Company, L.L.C., Marlborough, MA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C08F / ; G03F / ;
U.S. Cl.
CPC ...
5253288 ; 525353 ; 5253335 ; 525505 ; 430192 ; 4302701 ; 430905 ; 522126 ;
Abstract
An alkali soluble resin, preferably a phenolic resin, having a portion of its phenolic hydroxyl groups reacted to form a blocking group inert to acid or base. The polymer is used for the formulation of acid hardening photoresists and the presence of the inert blocking group enables development of an exposed photoresist with a strong developer without formation of microbridges between fine line features.