The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 11, 1996
Filed:
Jan. 14, 1994
Uwe Wielsch, Berlin, DE;
Uwe Richter, Berlin, DE;
Helmut Witek, Planegg, DE;
Albrecht Kruger, Berlin, DE;
Sentech Instruments GmbH, Berlin, DE;
Abstract
Characteristic values of transparent layers in the nanometer range, such a layer thickness and refractive index, can be determined with a spectro-ellipsometer. The task is to determine these values even with a less elaborate ellipsometer which only operates at one or a few wavelengths. In accordance with the invention, first at least one pair of the ellipsometric angles psi and delta are measured with at least one angle of incidence of the light beams on the sample for at least one ellipsometer wavelength, from which at least one characteristic value is determined for one ellipsometer period. Furthermore, the wavelength-dependent reflection of the probe in the wavelength range of interest is photometrically measured and from this the spectral dependency of the characteristic value is determined with the ellipsometrically measured characteristic value.