The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Nov. 07, 1995

Filed:

Aug. 17, 1993
Applicant:
Inventors:

Craig B Prater, Santa Barbara, CA (US);

James Massie, Santa Barbara, CA (US);

David A Grigg, Santa Barbara, CA (US);

Virgil B Elings, Santa Barbara, CA (US);

Paul K Hansma, Santa Barbara, CA (US);

Barney Drake, Santa Barbara, CA (US);

Assignees:

Digital Instruments, Inc., Santa Barbara, CA (US);

The Regents of the University of California, Oakland, CA (US);

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01B / ;
U.S. Cl.
CPC ...
73105 ;
Abstract

A scanned-stylus atomic force microscope (AFM) employing the optical lever technique, and method of operating the same. The AFM of the invention includes a light source and a scanned optical assembly which guides a light beam emitted from the laser source onto a point on said cantilever during scanning thereof. A moving laser beam is thus created which will automatically track the movement of the cantilever during scanning. The invention also allows the laser beam to be used to measure, calibrate or correct the motion of the scanning mechanism, and further allows viewing of the sample and cantilever using an optical microscope.


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