The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 20, 1995
Filed:
May. 11, 1994
Richard A Conti, Mt. Kisco, NY (US);
David E Kotecki, Hopewell Junction, NY (US);
Donald L Wilson, New Windsor, NY (US);
Justin W Wong, South Burlington, VT (US);
Steven P Zuhoski, Rowlett, TX (US);
Internation Business Machines Corporation, Armonk, NY (US);
Abstract
A removable gas injector design compatible for use in chemical vapor deposition reactors that allows proper mixing of the reactant gases, reduced cycle time associated with cleaning of gas injector components, and elimination of uncertainties associated with manual cleaning of the injector. A better reliability to the system due to the known condition of the nozzle after a clean is achieved.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile