The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 23, 1993
Filed:
Jun. 29, 1990
John C Stover, Bozeman, MT (US);
James A Bender, Bozeman, MT (US);
Marvin L Bernt, Bozeman, MT (US);
Donald R Bjork, Bozeman, MT (US);
Paul D Chausse, Bozeman, MT (US);
Daniel R Cheever, Bozeman, MT (US);
Kelly H Kirchner, Bozeman, MT (US);
Tod F Schiff, Bozeman, MT (US);
Vincent C Skurdal, Bozeman, MT (US);
TMA Technologies, Inc., Bozeman, MT (US);
Abstract
An optical measurement device produces quality light scatter measurements using Bidirectional Reflective Distribution Function (BRDF) techniques to analyze data generated from an accurate, portable, relatively inexpensive scatterometer. The scatterometer is provided with interchangeable scanning heads, each scanning head being equipped with ROM data storage containing certain configuration information about the scanning head. The use of the interchangeable scanning heads allows the present invention to make measurements of light scatter for a wide variety of applications and samples under a variety of environmental conditions where scatter measurement has previously not been feasible.