The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 25, 1991

Filed:

Nov. 28, 1989
Applicant:
Inventors:

Virgil B Elings, Santa Barbara, CA (US);

John A Gurley, Santa Barbara, CA (US);

Dror Sarid, Tucson, A;

Assignee:

Digital Instruments, Inc., Santa Barbara, CA (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01B / ;
U.S. Cl.
CPC ...
73105 ;
Abstract

This is an atomic force microscope in which the sensor can be built as a very small integrated structure. The sensor utilizes optical interference and can be operated in either the contact mode for high resolution or in the non-contact mode to measure electric and magnetic fields. One configuration of this microscope is a stand-alone configuration in which the microscope can be placed on or be suspended above large samples for sanning of small local areas thereof. The sensor is built into a scanner so that the sensor can be scanned over a stationary sample.


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