The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 02, 1989
Filed:
Oct. 07, 1987
Applicant:
Inventors:
Akira Fukunaga, Kanagawa, JP;
Hidenobu Arimitsu, Kanagawa, JP;
Yoshiharu Yasuhara, Kanagawa, JP;
Toshihiko Shiota, Kanagawa, JP;
Assignees:
Ebara Research Co., Ltd., Kanagawa, JP;
Ebara Corporation, Tokyo, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
B01D / ; B01D / ; B01J / ; B01J / ;
U.S. Cl.
CPC ...
502402 ; 502404 ; 423240 ; 55 71 ; 55 74 ;
Abstract
An absorber that is capable of efficient absorption of SiF.sub.4 and/or BCl.sub.3 present in gases that are discharged from semiconductor fabrication plants, ceramic producing plants and other plants is disclosed. The absorber contains an alkali agent, water and a superabsorbent as effective components. This absorber, when used to treat an effluent gas, attains as high reaction rate as in the conventional wet process and can be handled as easily as in the dry process.