The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 21, 1989
Filed:
Jul. 29, 1986
Hatsuyuki Arai, Zama, JP;
Isao Nagahashi, Fujisawa, JP;
Seiichi Maeda, Ayase, JP;
Kazumi Yasuda, Zama, JP;
Shiro Furusawa, Fujisawa, JP;
Kazuhiko Hirata, Sagamihara, JP;
Kastunori Nagao, Ayase, JP;
Kazuhiko Kondo, Atsugi, JP;
Takaya Sanoki, Ebina, JP;
Misuo Sugiyama, Hadano, JP;
Shinichi Kusano, Yamato, JP;
Speedfam Co., Ltd., , JP;
Abstract
Described herein is a flat lapping machine capable of precision-abrading simultaneously flat surfaces on the front and rear sides of a work in the fashion of lapping, polishing and grinding machines. The present invention contemplates to provide a flat lapping machine which is simplified in construction as compared with conventional flap lapping machines having a large number of carriers in planetary motions, and which can stop the respective carriers easily in specific positions and directions at the end of a lapping operation. To this end, the present invention employs a large number of support gear mechanisms each constituted by a plural number of small gears and located at uniform intervals around a center gear, rotatably supporting the respective carriers in predetermined positions while the respective carriers are driven by the center gear.