The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 07, 1989
Filed:
Jan. 27, 1987
Applicant:
Inventors:
Kazunori Imamura, Tokyo, JP;
Fuminori Hayano, Fujisawa, JP;
Yukio Kakizaki, Yokohama, JP;
Jiro Kobayashi, Yamato, JP;
Assignee:
Nikon Corporation, Tokyo, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01N / ; G01V / ;
U.S. Cl.
CPC ...
250561 ; 2502221 ; 2502 / ; 414331 ;
Abstract
A conveyor arm apparatus unloads one by one a plurality of wafers which are stored in a holding chamber such that a surface of one wafer faces a back surface of another wafer at a predetermined distance. Two beams parallel to a semiconductor wafer mounting surface of a conveyor arm are projected into the holding chamber and the two beams passing through a gap between adjacent wafers are detected. Thus, the relative position of the conveyor arm and the wafers in the holding chamber can be confirmed.